Electrostatic All-Silicon MEMS Speakers for In-Ear Audio Applications - Acoustic Measurements and Modelling Approach
* Presenting author
This paper presents the acoustic properties of a novel electroacoustic MEMS transducer. The transducer is based on electrostatic bending actuators with lateral deflection, i.e. in the chip plane. A large number of such bending actuators is arranged in pairs and move in phase opposition. By means of an appropriate sound guidance, areas of opposite phase pressure changes are separated, so that the acoustic short circuit is avoided and audible sound is generated by the system. In this paper, acoustic measurements recorded with a standard coupler are discussed and compared with the results of model calculations. The main focus is on system-specific features that provide important insights for the enhancement of future designs in terms of sound pressure level and distortion.